Strategies to obtain pattern fidelity in nanowire growth from large-area surfaces patterned using nanoimprint lithography

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Authors: Gaute Otnes, Magnus Heurlin, Mariusz Graczyk, Jesper Wallentin, Daniel Jacobsson, Alexander Berg, Ivan Maximov, Magnus T. Borgström

Journal title: Nano Research

Journal number: 9/10

Journal publisher: Tsinghua Univ Press

Published year: 2016

Published pages: 2852-2861

DOI identifier: 10.1007/s12274-016-1165-z

ISSN: 1998-0124