Multibeam Micro-Drilling with High-Power Ultrashort Laser Pulses: 2-Stage Beam-Splitting Strategy and Implementation

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Authors: Emeric Biver, Julien Dupuy, Yves Hernandez, Anne Henrottin, Julien Pouysegur, and Roberto Ocaña

Journal title: Journal of Laser Micro/Nanoengineering

Journal number: Vol. 18, No. 1,

Journal publisher: Japan Laser Processing

Published year: 2023

Published pages: 36-44

DOI identifier: 10.2961/jlmn.2023.01.2007

ISSN: 1880-0688