Piezoelectric MEMS for acoustic and ultrasonic applications

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Authors: Lixiang Wu; Tingzhong Xu; Javad Abbaszadeh; Mohssen Moridi

Journal title: 2022 IEEE International Symposium on Applications of Ferroelectrics (ISAF) Proceedings

Journal publisher: IEEE

Published year: 2022

DOI identifier: 10.1109/isaf51494.2022.9870162

ISBN: 978-1-6654-4841-3