Dual-frequency piezoelectric MEMS microphones based on AlSc30%N thin films for aeroacoustic measurements

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Authors: Lixiang Wu, Yanfen Zhai, Onteru Lokesh, Claire Bourquard, Javad Abbaszadeh, Nikolai Andrianov, Jose A. Garcia Souto, Thai Anh Tuan Nguyen, Xuyuan Chen, Kolja Erbacher, Ha-Duong Ngo, Olivier Sainges and Emmanuel Julliard

Journal title: AIAA AVIATION 2023 Forum

Journal publisher: American Institute of Aeronautics and Astronautics, Inc.

Published year: 2023

DOI identifier: 10.2514/6.2023-4391