A Novel Piezoresitive Microphone MEMS Sensor For Aerospace Applications

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Authors: Ha Duong Ngo, Kolja Erbacher, Lixiang Wu, Bei Wang, Zirui Pang, Julien Weiss, Pablo Acedo

Journal title: 2022 IEEE International Conference on Electrical, Computer and Energy Technologies (ICECET) Proceedings

Journal publisher: IEEE

Published year: 2022

DOI identifier: 10.1109/icecet55527.2022.9872990

ISBN: 978-1-6654-7087-2