Scalable and efficient grating couplers on low-index photonic platforms enabled by cryogenic deep silicon etching

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Authors: Emma Lomonte; Maik Stappers; Linus Krämer; Wolfram H.P. Pernice; Francesco Lenzini

Journal title: arXiv:2305.00907v1

Journal publisher: arXiv:2305.00907v1

Published year: 2023

DOI identifier: 10.48550/arxiv.2305.00907