Scalable non–volatile tuning of photonic computational memories by automated silicon ion implantation

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Authors: A. Varri, S. Taheriniya, F. Brückerhoff-Plückelmann, I. Bente, N. Farmakidis, D. Bernhardt, H. Rösner, M. Kruth, A. Nadzeyka, T. Richter, C. D. Wright, H. Bhaskaran, G. Wilde, W. H. P. Pernice

Journal title: Advanced Materials

Journal publisher: Wiley

Published year: 2023

DOI identifier: 10.1002/adma.202310596

ISSN: 1521-4095