Self-Assembly of Nanovoids in Si Microcrystals Epitaxially Grown on Deeply Patterned Substrates

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Authors: Andrea Barzaghi; Giovanni Isella; Marco Salvalaglio; Andrea Ballabio; Roberto Bergamaschini; João Valente; Axel Voigt; Douglas J. Paul; M Albani; Andreas Beyer; Francesco Montalenti; Saleh Firoozabadi; Leo Miglio; Kerstin Volz

Journal title: Crystal Growth and Design

Journal number: 20

Journal publisher: American Chemical Society

Published year: 2020

Published pages: 2914-2920

DOI identifier: 10.1021/acs.cgd.9b01312

ISSN: 1528-7483