NbTiN thin films for superconducting photon detectors on photonic and two-dimensional materials

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Authors: Stephan Steinhauer, Lily Yang, Samuel Gyger, Thomas Lettner, Carlos Errando-Herranz, Klaus D. Jöns, Mohammad Amin Baghban, Katia Gallo, Julien Zichi, Val Zwiller

Journal title: Applied Physics Letters

Journal number: 116/17

Journal publisher: American Institute of Physics

Published year: 2020

Published pages: 171101

DOI identifier: 10.1063/1.5143986

ISSN: 0003-6951