Fabrication of low aspect ratio three-element Boersch phase shifters for voltage-controlled three electron beam interference

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Authors: Pooja Thakkar, Vitaliy A. Guzenko, Peng-Han Lu, Rafal E. Dunin-Borkowski, Jan Pieter Abrahams, Soichiro Tsujino

Journal title: Journal of Applied Physics

Journal number: 128/13

Journal publisher: American Institute of Physics

Published year: 2020

Published pages: 134502

DOI identifier: 10.1063/5.0020383

ISSN: 0021-8979