Investigation of Ion Channeling and Scattering for Single‐Ion Implantation with High Spatial Resolution

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Authors: Nicole Raatz, Clemens Scheuner, Sébastien Pezzagna, Jan Meijer

Journal title: physica status solidi (a)

Journal number: 216/21

Journal publisher: Wiley - V C H Verlag GmbbH & Co.

Published year: 2019

Published pages: 1900528

DOI identifier: 10.1002/pssa.201900528

ISSN: 1862-6300