Gas Cluster Ion Beam Cleaning of CVD-Grown Graphene for Use in Electronic Device Fabrication

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Authors: Barry Brennan, Alba Centeno, Amaia Zurutuza, Paul Mack, Keith R. Paton, Andrew J. Pollard

Journal title: ACS Applied Nano Materials

Journal number: 4/5

Journal publisher: AMER CHEMICAL SOC

Published year: 2021

Published pages: 5187-5197

DOI identifier: 10.1021/acsanm.1c00519

ISSN: 2574-0970