Graphene Membranes for Hall Sensors and Microphones Integrated with CMOS-Compatible Processes

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Authors: Sebastian Wittmann, Christoph Glacer, Stefan Wagner, Stephan Pindl, Max C. Lemme

Journal title: ACS Applied Nano Materials

Journal number: 2/8

Journal publisher: ACS Publications

Published year: 2019

Published pages: 5079-5085

DOI identifier: 10.1021/acsanm.9b00998

ISSN: 2574-0970