Secondary ion mass spectrometry investigation of carbon grain formation in boron nitride epitaxial layers with atomic depth resolution

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Authors: Paweł Piotr Michałowski, Piotr Caban, Jacek Baranowski

Journal title: Journal of Analytical Atomic Spectrometry

Journal number: 34/5

Journal publisher: Royal Society of Chemistry

Published year: 2019

Published pages: 848-853

DOI identifier: 10.1039/c9ja00004f

ISSN: 0267-9477