Integrating graphene into semiconductor fabrication lines

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Authors: Daniel Neumaier, Stephan Pindl, Max C. Lemme

Journal title: Nature Materials

Journal number: 18/6

Journal publisher: Nature Publishing Group

Published year: 2019

Published pages: 525-529

DOI identifier: 10.1038/s41563-019-0359-7

ISSN: 1476-1122