Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications

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Authors: Xuge Fan, Anderson D. Smith, Fredrik Forsberg, Stefan Wagner, Stephan Schröder, Sayedeh Shirin Afyouni Akbari, Andreas C. Fischer, Luis Guillermo Villanueva, Mikael Östling, Max C. Lemme, Frank Niklaus

Journal title: Microsystems & Nanoengineering

Journal number: 6/1

Journal publisher: Nature Publishing Group

Published year: 2020

DOI identifier: 10.1038/s41378-019-0128-4

ISSN: 2055-7434