The role of hydrogen in carbon incorporation and surface roughness of MOCVD-grown thin boron nitride

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Authors: Piotr A. Caban, Dominika Teklinska, Pawel P. Michalowski, Jaroslaw Gaca, Marek Wojcik, Justyna Grzonka, Pawel Ciepielewski, Malgorzata Mozdzonek, Jacek M. Baranowski

Journal title: Journal of Crystal Growth

Journal number: 498

Journal publisher: Elsevier BV

Published year: 2018

Published pages: 71-76

DOI identifier: 10.1016/j.jcrysgro.2018.06.001

ISSN: 0022-0248