Material-specific high-resolution table-top extreme ultraviolet microscopy

Summary

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Authors: Eschen, Wilhelm; Lötgering, Lars; Schuster, Vittoria; Klas, Robert; Kirsche, Alexander; Berthold, Lutz; Steinert, Michael; Pertsch, Thomas; Gross, Herbert; Krause, Michael; Limpert, Jens; Rothhardt, Jan

Journal title: Light-Science & Applications

Journal number: 11 (1)

Journal publisher: Nature Portfolio

Published year: 2022

Published pages: 10

DOI identifier: 10.1038/s41377-022-00797-6

ISSN: 2047-7538