High-resolution wavefront sensing and aberration analysis of multi-spectral extreme ultraviolet beams

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Authors: Mengqi Du; Xiaomeng Liu; Antonios Pelekanidis; Fengling Zhang; Lars Loetgering; Patrick Konold; Christina L. Porter; Peter Smorenburg; Kjeld S. E. Eikema; Stefan Witte

Journal title: Optica

Journal number: 10

Journal publisher: Optica Publishing Group

Published year: 2023

Published pages: 255-263

DOI identifier: 10.1364/optica.478346

ISSN: 2334-2536