Non-invasive digital etching of van der Waals semiconductors

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Authors: Jian Zhou, Chunchen Zhang, Li Shi, Xiaoqing Chen, Tae Soo Kim, Minseung Gyeon, Jian Chen, Jinlan Wang, Linwei Yu, Xinran Wang, Kibum Kang, Emanuele Orgiu, Paolo Samorì, Kenji Watanabe, Takashi Taniguchi, Kazuhito Tsukagoshi, Peng Wang, Yi Shi, Songlin Li

Journal title: Nature Communications

Journal number: 13/1

Journal publisher: Nature Publishing Group

Published year: 2022

Published pages: 1844

DOI identifier: 10.1038/s41467-022-29447-6

ISSN: 2041-1723