Microwave plasma modelling in clamshell chemical vapour deposition diamond reactors

Summary

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Authors: JA Cuenca, S Mandal, ELH Thomas and OA Williams

Journal title: Diamond and Related Materials

Journal publisher: Elsevier BV

Published year: 2021

DOI identifier: 10.1016/j.diamond.2022.108917

ISSN: 0925-9635