Effect of slurry composition on the chemical mechanical polishing of thin diamond films

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Authors: Werrell, Jessica M.; Mandal, Soumen; Thomas, Evan L. H.; Brousseau, Emmanuel B.; Lewis, Ryan; Borri, Paola; Davies, Philip R.; Williams, Oliver A.

Journal title: Science and Technology of Advanced Materials

Journal publisher: National Institute for Materials Science and Elsevier BV Japan

Published year: 2017

ISSN: 1468-6996