Redox agent enhanced chemical mechanical polishing of thin film diamond

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Authors: Soumen Mandal; Evan L. H. Thomas; Laia Gines; David J. Morgan; Joshua Green; Emmanuel Bruno Jean Paul Brousseau; Oliver A. Williams

Journal title: Carbon

Journal publisher: Pergamon Press Ltd.

Published year: 2018

DOI identifier: 10.1016/j.carbon.2017.12.077

ISSN: 0008-6223