Control of Knock-On Damage for 3D Atomic Scale Quantification of Nanostructures: Making Every Electron Count in Scanning Transmission Electron Microscopy

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Authors: Sandra Van Aert, Annick De Backer, Lewys Jones, Gerardo T. Martinez, Armand Béché, Peter D. Nellist

Journal title: Physical Review Letters

Journal number: 122/6

Journal publisher: American Physical Society

Published year: 2019

DOI identifier: 10.1103/PHYSREVLETT.122.066101

ISSN: 0031-9007