Selective Etching of (111)B‐Oriented Al x Ga 1− x As‐Layers for Epitaxial Lift‐Off

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Authors: Tobias Henksmeier, Martin Eppinger, Bernhard Reineke, Thomas Zentgraf, Cedrik Meier, Dirk Reuter

Journal title: physica status solidi (a)

Journal number: 218/3

Journal publisher: Wiley - V C H Verlag GmbbH & Co.

Published year: 2021

Published pages: 2000408

DOI identifier: 10.1002/pssa.202000408

ISSN: 1862-6300