An efficient chemistry-enhanced CFD model for the investigation of the rate-limiting mechanisms in industrial Chemical Vapor Deposition reactors

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Authors: Paris Papavasileiou; Eleni D. Koronaki; Gabriele Pozzetti; Martin Kathrein; Christoph Czettl; Andreas G. Boudouvis; T.J. Mountziaris; Stéphane P.A. Bordas

Journal title: Chemical Engineering Research and Design

Journal number: 1

Journal publisher: Institute of Chemical Engineers

Published year: 2022

DOI identifier: 10.1016/j.cherd.2022.08.005

ISSN: 0263-8762