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Authors: H. Nizard, M. Maicu, D. Hecker, D. Gloess, P.Frach, G. Gerlach
Journal title: Abstract booklet of the 4th Magnetron, Ion processing & Arc Technologies European Conference (MIATEC) & 14th International Symposium on Reactive Sputter Deposition (RSD), Paris, 8-11 Dec. 2015 - Programme Errata & changes
Journal publisher: Société Francaise du Vide (SFV)
Published year: 2015
Published pages: P4.12-109