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Authors: H. Nizard, M. Maicu, D. Hecker, D. Gloess, P.Frach, G. Gerlach
Journal title: Book of abstracts, International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Sept. 12-16, 2016
Journal publisher: EFDS - Europäische Forschungsgesellschaft Dünne Schichten e.V.
Published year: 2016
Published pages: 300