A Novel Hierarchical Tree-DCNN Structure for Unbalanced Data Diagnosis in Microelectronic Manufacturing Process

Summary

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Authors: Yong Zeng, Yanfang Mei, Yueming Hu, Zhengguo Sheng

Journal title: IEEE Transactions on Instrumentation and Measurement

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2023

DOI identifier: 10.1109/tim.2023.3338692

ISSN: 0018-9456