Laser Assisted Patterning of a-Si:H: Detailed Investigation of Laser Damage

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Authors: Xu, Menglei; Bearda, Twan; Sivaramakrishnan Radhakrishnan, Hariharsudan; Filipič, Miha; Debucquoy, Maarten; Gordon, Ivan; Szlufcik, Jozef; Poortmans, Jef

Journal title: physica status solidi (RRL) - Rapid Research Letters

Journal number: 1

Journal publisher: WILEY-VCH

Published year: 2017

DOI identifier: 10.5281/zenodo.844614

ISSN: 1862-6270