Circularly symmetric nanopores in 3D femtosecond laser nanolithography with burst control and the role of energy dose

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Authors: Franzette Paz-Buclatin , Marcos Esquivel-González , Alfredo Casasnovas-Melián , Omar de Varona , Carlos Cairós , Juan Manuel Trujillo-Sevilla , Kei Kamada , Akira Yoshikawa , Jose Manuel Rodríguez-Ramos , Leopoldo Luis Martin and Airan Ródenas

Journal title: Nanophotonics

Journal publisher: De Gruyter

Published year: 2023

DOI identifier: 10.1515/nanoph-2022-0665

ISSN: 2192-8614