Selective atomic layer deposition on flexible polymeric substrates employing a polyimide adhesive as a physical mask

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Authors: Matin Forouzmehr, Serges Zambou, Kimmo Lahtonen, Mari Honkanen, Rafi Md Nazmul Anam, Aleksi Ruhanen, Chakra Rokaya, Donald Lupo, Paul R. Berger

Journal title: Journal of Vacuum Science & Technology A

Journal number: 39/1

Journal publisher: American Institute of Physics

Published year: 2021

Published pages: 012405

DOI identifier: 10.1116/6.0000566

ISSN: 0734-2101