Spatial Atomic Layer Deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials

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Authors: David Muñoz-Rojas, Viet Huong Nguyen, César Masse de la Huerta, Sara Aghazadehchors, Carmen Jiménez, Daniel Bellet

Journal title: Comptes Rendus Physique

Journal number: 18/7-8

Journal publisher: Elsevier Masson

Published year: 2017

Published pages: 391-400

DOI identifier: 10.1016/j.crhy.2017.09.004

ISSN: 1631-0705