A novel voice coil motor-driven compliant micropositioning stage based on flexure mechanism

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Authors: Jiangkun Shang, Yanling Tian, Zheng Li, Fujun Wang, Kunhai Cai

Journal title: Review of Scientific Instruments

Journal number: 86/9

Journal publisher: American Institute of Physics

Published year: 2015

Published pages: 095001

DOI identifier: 10.1063/1.4929867

ISSN: 0034-6748