A novel monolithic piezoelectric actuated flexure-mechanism based wire clamp for microelectronic device packaging

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Authors: Cunman Liang, Fujun Wang, Yanling Tian, Xingyu Zhao, Hongjie Zhang, Liangyu Cui, Dawei Zhang, Placid Ferreira

Journal title: Review of Scientific Instruments

Journal number: 86/4

Journal publisher: American Institute of Physics

Published year: 2015

Published pages: 045106

DOI identifier: 10.1063/1.4918621

ISSN: 0034-6748