Dynamic modeling and control of a novel XY positioning stage for semiconductor packaging

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Authors: F. Wang, Z. Ma, W. Gao, X. Zhao, Y. Tian, D. Zhang, C. Liang

Journal title: Transactions of the Institute of Measurement and Control

Journal number: 37/2

Journal publisher: SAGE Publications

Published year: 2015

Published pages: 177-189

DOI identifier: 10.1177/0142331214541598

ISSN: 0142-3312