Laser-Based Sensing, Measurement, and Misalignment Control of Coupled Linear and Angular Motion for Ultrahigh Precision Movement

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Authors: Leon Clark, Bijan Shirinzadeh, Yanling Tian, Denny Oetomo

Journal title: IEEE/ASME Transactions on Mechatronics

Journal number: 20/1

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2015

Published pages: 84-92

DOI identifier: 10.1109/TMECH.2014.2301824

ISSN: 1083-4435