Probe system design for three dimensional micro/nano scratching machine

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Authors: Zhiyong Guo, Yanling Tian, Jia Tian, Xianping Liu, Fujun Wang, Hongjie Zhang, Dawei Zhang

Journal title: Microsystem Technologies

Journal number: 23/6

Journal publisher: Springer Verlag

Published year: 2016

Published pages: 2285-2295

DOI identifier: 10.1007/s00542-016-3115-9

ISSN: 0946-7076