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Authors: Smyrek, Peter; Zheng, Yijing; Seifert, Hans Jürgen; Pfleging, Wilhelm; Klotzbach, Udo [Hrsg.]; Washio, Kunihiko [Hrsg.]; Kling, Rainer [Hrsg.]
Journal title: Laser-based Micro- and Nanoprocessing XII
Journal number: Proceedings Volume 10520
Journal publisher: SPIE
Published year: 2018
DOI identifier: 10.5445/IR/1000080523