Bio-inspired hierarchical patterning of silicon by laser interference lithography

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Authors: Yaowei Hu, Zuobin Wang, Zhankun Weng, Miao Yu, Dapeng Wang

Journal title: Applied Optics

Journal number: 55/12

Journal publisher: Optical Society of America

Published year: 2016

Published pages: 3226

DOI identifier: 10.1364/AO.55.003226

ISSN: 0003-6935