Fabrication of micropolarizers by electron beam lithography

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Authors: Yinxue Fan, Miao Yu, Shuyi Li, Zuobin Wang, Zhengxun Song

Journal title: 2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

Journal publisher: IEEE

Published year: 2016

Published pages: 15-18

DOI identifier: 10.1109/3m-nano.2016.7824986

ISBN: 978-1-5090-2945-7