Effects of laser fluence on silicon modification by four-beam laser interference

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Authors: Le Zhao, Zuobin Wang, Jinjin Zhang, Miao Yu, Siwei Li, Dayou Li, Yong Yue

Journal title: Journal of Applied Physics

Journal number: 118/23

Journal publisher: American Institute of Physics

Published year: 2015

Published pages: 233106

DOI identifier: 10.1063/1.4937579

ISSN: 0021-8979