Lithography-induced wettability changes of silicon

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Authors: Jiajing Zhu, Yanling Tian, Chengjuan Yang, Fujun Wang, Yanling Tian, Xianping Liu

Journal title: 2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

Journal publisher: IEEE

Published year: 2017

Published pages: 69-73

DOI identifier: 10.1109/3m-nano.2017.8286259

ISBN: 978-1-5386-1081-7