Design of A Novel Piezoelectric Actuated Two-Degree-of-freedom Compliant Stage

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Authors: Sishuo Huang, Xiubing jing, Peng Shang, Fujun Wang

Journal title: 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

Journal publisher: IEEE

Published year: 2018

Published pages: 18-22

DOI identifier: 10.1109/3m-nano.2018.8552254

ISBN: 978-1-5386-6214-4