Compact W-band Silicon-Micromachined Filters with Increased Fabrication Robustness

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Authors: O. Glubokov, M. Mehrabi Gohari, J. Campion, J. Oberhammer

Journal title: 2022 IEEE/MTT-S International Microwave Symposium - IMS 2022

Journal publisher: IEEE

Published year: 2022

Published pages: 329-332

DOI identifier: 10.1109/ims37962.2022.9865295