High-Q Si 3 N 4 microresonators based on a subtractive processing for Kerr nonlinear optics

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Authors: Zhichao Ye, Krishna Twayana, Peter A. Andrekson, Victor Torres-Company

Journal title: Optics Express

Journal number: 27/24

Journal publisher: Optical Society of America

Published year: 2019

Published pages: 35719

DOI identifier: 10.1364/oe.27.035719

ISSN: 1094-4087