Laser ablation and injection moulding as techniques for producing micro channels compatible with Small Angle X-Ray Scattering

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Authors: R. Haider, B. Marmiroli, I. Gavalas, M. Wolf, M. Matteucci, R. Taboryski, A. Boisen, E. Stratakis, H. Amenitsch

Journal title: Microelectronic Engineering

Journal number: 195

Journal publisher: Elsevier BV

Published year: 2018

Published pages: 7-12

DOI identifier: 10.1016/j.mee.2018.03.015

ISSN: 0167-9317