Nanoimprint stamps with ultra-high resolution: Optimal fabrication techniques

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Authors: Mariusz Graczyk, Andrea Cattoni, Benedikt Rösner, Gediminas Seniutinas, Anette Löfstrand, Anders Kvennefors, Dominique Mailly, Christian David, Ivan Maximov

Journal title: Microelectronic Engineering

Journal number: 190

Journal publisher: Elsevier BV

Published year: 2018

Published pages: 73-78

DOI identifier: 10.1016/j.mee.2018.01.008

ISSN: 0167-9317