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Authors: M. Makita, P. Karvinen, V.A. Guzenko, N. Kujala, P. Vagovic, C. David
Journal title: Microelectronic Engineering
Journal number: 176
Journal publisher: Elsevier BV
Published year: 2017
Published pages: 75-78
DOI identifier: 10.1016/j.mee.2017.02.002
ISSN: 0167-9317