Patterning of diamond like carbon films for sensor applications using silicon containing thermoplastic resist (SiPol) as a hard mask

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Authors: D. Virganavičius, V.J. Cadarso, R. Kirchner, L. Stankevičius, T. Tamulevičius, S. Tamulevičius, H. Schift

Journal title: Applied Surface Science

Journal number: 385

Journal publisher: Elsevier BV

Published year: 2016

Published pages: 145-152

DOI identifier: 10.1016/j.apsusc.2016.05.100

ISSN: 0169-4332